Parametric Study of Thin-film Zero-Group Velocity Resonators (ZGVR)

被引：2

作者：

Yantchev, V. ^{[1
]}

Arapan, L. ^{[1
]}

Ivanov, I.

Uzunov, I.

Katardjiev, I. ^{[1
]}

Plessky, V.

机构：

[1] Uppsala Univ, Angstrom Lab, Uppsala, Sweden

来源：

2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2012年

关键词：

Thin Film; Lamb Wave; Resonator; AlN; WAVE RESONATORS;

D O I：

10.1109/ULTSYM.2012.0075

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Here we demonstrate experimentally a novel, small form factor, resonant architecture employing the intrinsic zero-group-velocity dispersion of the first order symmetric Lamb wave S1 propagating in piezoelectric AlN film membranes. Designs with different topologies were fabricated and compared. FEM analysis is used to verify the observed differences while providing a deeper insight to the resonator performance. Technique for improvement of the device performance are further proposed.

引用

页码：307 / 310

页数：4

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