NANOLITHOGRAPHY Painting with block copolymers

被引：9
|
作者：
Register, Richard A. [1 ]
机构：
[1] Princeton Univ, Dept Chem & Biol Engn, Princeton, NJ 08544 USA
来源：
NATURE NANOTECHNOLOGY | 2013年 / 8卷 / 09期
关键词：
THIN-FILMS; ORDER; MATS;
D O I：
10.1038/nnano.2013.175
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A combination of self-assembly and jet printing can be used to create block copolymer films with complex structures and tunable periodicities across a large substrate.
引用
收藏
页码：618 / 619
页数：3
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