EFFECT OF DEPOSITION CONDITIONS ON MECHANICAL PROPERTIES OF MAGNETRON SPUTTERED SiC THIN FILMS

被引：0
|
作者：
Ctvrtlik, Radim [1 ,2 ]
Kulikovsky, Valeriy [3 ]
Bohac, Petr [3 ]
Blahova, Olga [4 ]
机构：
[1] Palacky Univ, Joint Lab Opt, Fac Sci, Reg Ctr Adv Technol & Mat, Olomouc 77900, Czech Republic
[2] Acad Sci Czech Republ, Inst Phys, Olomouc 77900, Czech Republic
[3] Acad Sci Czech Republ, Inst Phys, Vvi, Prague 18221, Czech Republic
[4] Univ W Bohemia, New Technol Res Ctr, Plzen 30614, Czech Republic
来源：
CHEMICKE LISTY | 2012年 / 106卷
关键词：
silicon carbide; thin films; nanoindentation; mechanical properties; coefficient of friction; ELASTIC-MODULUS; HARDNESS;
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
R. Ctvrtlik(a), V. Kulikovsky(b), P. Bohac(b), and O. Blahova(c) ((a) Palacky University, Faculty of Science, Regional Centre of Advanced Technologies and Materials, Joint Laboratory of Optics of Palacky University and Institute of Physics of Academy of Sciences of the Czech Republic, Olomouc, (b) Institute of Physics, Academy of Sciences of the Czech Republic, Praha, (c) New Technologies-Research Centre, University of West Bohemia, Plzen, Czech Republic): Effect of Deposition Conditions on Mechanical Properties of Magnetron Sputtered SiC Thin Films The interdependence of mechanical properties (hardness, elastic modulus, internal stress, coefficient of friction), structure and composition of various amorphous and nanocrystalline DC magnetron and DC reactive magnetron sputtered SiC a SiC: H films was studied. Composition was determined by electron micro analyses and structure was investigated using Raman spectroscopy. Indentation hardness and reduced modulus were measured by instrumented nanoindentation, the coefficient of friction was evaluated using pin-on-disc method. It has been shoved that mechanical and tribological properties of a-SiC are strongly influenced by conditions of deposition process. Using appropriate deposition setup it is possible to obtain superhard nanocrystalline films with hardness of 40 GPa (higher than alpha-SiC) as well as films compromising high hardness (approx. 19 GPa) and relatively low friction (approx. 0.15).
引用
收藏
页码：S395 / S398
页数：4
相关论文
共 50 条
  • [1] Magnetron sputtered NbN thin films and mechanical properties
    Han, ZH
    Hu, XP
    Tian, JW
    Li, GY
    Gu, MY
    SURFACE & COATINGS TECHNOLOGY, 2004, 179 (2-3): : 188 - 192
  • [2] Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films
    Du, Shiwen
    Li, Yongtang
    ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2015, 2015
  • [3] Microstructural and mechanical properties of magnetron sputtered SiOxNy thin films
    Manikandan, V. N.
    Kumar, P. R. Kishore
    Raj, P. Deepak
    Sridharan, M.
    MATERIALS TODAY-PROCEEDINGS, 2016, 3 (06) : 1531 - 1535
  • [4] Electrical properties of magnetron sputtered thin BaSrTiO3 films depending on deposition conditions
    Razumov, S
    Tumarkin, A
    Buslov, O
    Gaidukov, M
    Gagarin, A
    Ivanov, A
    Kozyrev, A
    Song, YW
    Park, CS
    INTEGRATED FERROELECTRICS, 2001, 39 (1-4) : 1317 - 1323
  • [5] Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films
    Tillmann, Wolfgang
    Kokalj, David
    Stangier, Dominic
    MATERIALIA, 2019, 5
  • [6] Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions
    Dimitrova, V
    Manova, D
    Valcheva, E
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 68 (01): : 1 - 4
  • [7] Characterization of the mechanical and tribological properties of sputtered a:SiC thin films
    Scharf, TW
    Inturi, RB
    Barnard, JA
    THIN FILMS: STRESSES AND MECHANICAL PROPERTIES VI, 1997, 436 : 311 - 316
  • [8] Effect of deposition mode and pulse parameters on the mechanical and tribological properties of magnetron sputtered TiBx films
    Grenadyorov, Alexander S.
    Rabotkin, Sergey, V
    Oskirko, Vladimir O.
    Goncharenko, Igor M.
    Semenov, Vyacheslav A.
    Oskomov, Konstantin, V
    Kraynova, Elizaveta O.
    Solovyev, Andrey A.
    THIN SOLID FILMS, 2025, 815
  • [9] Investigation of the Dielectric and Mechanical Properties for Magnetron Sputtered BCN Thin Films
    Prakash, Adithya
    Todi, Vinit
    Sundaram, Kalpathy B.
    Ross, Liza
    Xu, Guanghai
    French, Marc
    Henry, Patrick
    King, Sean W.
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2015, 4 (01) : N3122 - N3126
  • [10] Bias effect on microstructure and mechanical properties of magnetron sputtered nanocrystalline titanium carbide thin films
    Wang, Huili
    Zhang, Sam
    Li, Yibin
    Sun, Deen
    THIN SOLID FILMS, 2008, 516 (16) : 5419 - 5423
12345