Fabrication and characterization of single crystalline diamond nanopillars with NV-centers

被引：24
|
作者：
Widmann, C. J. [1 ]
Giese, C. [1 ]
Wolfer, M. [1 ]
Brink, D. [1 ]
Heidrich, N. [1 ]
Nebel, C. E. [1 ]
机构：
[1] Fraunhofer Inst Appl Solid State Phys IAF, D-79108 Freiburg, Germany
来源：
DIAMOND AND RELATED MATERIALS | 2015年 / 54卷
关键词：
Diamond; Nanopillars; NV-center; Inductively coupled plasma etching;
D O I：
10.1016/j.diamond.2014.10.005
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Single crystalline diamond nanowires of different sizes and shapes were fabricated with electron beam lithography and inductively coupled plasma etching using oxygen, Titanium and chromium have been used as etching mask, where titanium appeared to be more chemically resistant. We were able to fabricate nanowires from 60 nm diameter to 200 nm with a length of approximately 1 mu m. As the nanowire should be used in the future as a waveguide for the NV fluorescence originating from the apex of the structure, simulations were done with Comsol Multiphysics in order to determine the dependency between shape and guidance properties. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：2 / 8
页数：7
相关论文
共 50 条
  • [1] Investigation of NV centers in diamond nanocrystallites and nanopillars
    Petkov, Emil
    Popov, Cyril
    Rendler, Torsten
    Petkov, Christo
    Schnabel, Florian
    Fedder, Helmut
    Lee, Sang-Yun
    Kulisch, Wilhelm
    Reithmaier, Johann Peter
    Wrachtrup, Joerg
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2013, 250 (01): : 48 - 50
  • [2] Radiometric calibration of single photon detectors by a single photon source based on NV-centers in diamond
    Schmunk, W.
    Rodenberger, M.
    Peters, S.
    Hofer, H.
    Kueck, S.
    JOURNAL OF MODERN OPTICS, 2011, 58 (14) : 1252 - 1259
  • [3] Decay rate enhancement of diamond NV-centers on diamond thin films
    Li, Hao
    Ou, Jun-Yu
    Fedotov, Vassili A.
    Papasimakis, Nikitas
    OPTICS EXPRESS, 2021, 29 (16): : 25626 - 25631
  • [4] Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers
    Barclay, Paul E.
    Fu, Kai-Mei
    Santori, Charles
    Beausoleil, Raymond G.
    OPTICS EXPRESS, 2009, 17 (12): : 9588 - 9601
  • [5] NV-centers in diamond. Part I. general information, fabrication technology, and the structure of the spectrum
    Tsukanov A.V.
    Russian Microelectronics, 2012, 41 (2) : 91 - 106
  • [6] Spatially controlled fabrication of single NV centers in IIa HPHT diamond
    Trofimov, Sergei D.
    Tarelkin, Sergey A.
    Bolshedvorskii, Stepan, V
    Bormashov, Vitaly S.
    Troshchiev, Sergey Yu
    Golovanov, Anton, V
    Luparev, Nikolai, V
    Prikhodko, Dmitrii D.
    Boldyrev, Kirill N.
    Terentiev, Sergey A.
    Akimov, Alexey, V
    Kargin, Nikolay, I
    Kukin, Nikolay S.
    Gusev, Alexander S.
    Shemukhin, Andrey A.
    Balakshin, Yuri, V
    Buga, Sergei G.
    Blank, Vladimir D.
    OPTICAL MATERIALS EXPRESS, 2020, 10 (01) : 198 - 207
  • [7] Diamond-defect engineering of NV-centers using ion beam irradiation
    Toural, J. L. Sanchez
    Garcia-Perez, J.
    Bernardo-Gavito, R.
    Granados, D.
    Andrino-Gomez, A.
    Garcia, G.
    Pau, J. L.
    Ramos, M. A.
    Gordillo, N.
    DIAMOND AND RELATED MATERIALS, 2025, 151
  • [8] NV-centers in nanodiamonds: How good they are
    Plakhotnik, Taras
    Aman, Haroon
    DIAMOND AND RELATED MATERIALS, 2018, 82 : 87 - 95
  • [9] Optical Characterization of Single Tin-Vacancy Centers in Diamond Nanopillars
    Rugar, Alison E.
    Dory, Constantin
    Sun, Shuo
    Vackovic, Jelena
    2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2019,
  • [10] Quantum Magnetometer Based on Cross-Relaxation Resonances in Ensembles of NV-Centers in Diamond
    Akhmedzhanov, R. A.
    Gushchin, L. A.
    Zelensky, I. V.
    Kupaev, A. V.
    Nizov, V. A.
    Nizov, N. A.
    Sobgayda, D. A.
    TECHNICAL PHYSICS, 2024, 69 (02) : 121 - 128
12345