Micro-structuring irradiated by 197nm and 308nm excimer lasers

被引：0
|
作者：
Lou, QH [1 ]
Zhang, L [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
来源：
PHOTONIC SYSTEMS AND APPLICATIONS | 2001年 / 4595卷
关键词：
excimer laser; ablation; diffractive optical elements;
D O I：
10.1117/12.446604
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper, a fast process of fabrication of diffractive optical elements by excimer laser ablation of polymer films is mainly described. Dammann grating on PI and PC materials with feature size of 2 L in are successfully fabricated.
引用
收藏
页码：147 / 150
页数：4
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