A self-adaption compensation control for hysteresis nonlinearity in piezo-actuated stages based on Pi-sigma fuzzy neural network

Piezo-actuated stages are widely applied in the high-precision positioning field nowadays. However, the inherent hysteresis nonlinearity in piezo-actuated stages greatly deteriorates the positioning accuracy of piezo-actuated stages. This paper first utilizes a nonlinear autoregressive moving average with exogenous inputs (NARMAX) model based on the Pi-sigma fuzzy neural network (PSFNN) to construct an online rate-dependent hysteresis model for describing the hysteresis nonlinearity in piezo-actuated stages. In order to improve the convergence rate of PSFNN and modeling precision, we adopt the gradient descent algorithm featuring three different learning factors to update the model parameters. The convergence of the NARMAX model based on the PSFNN is analyzed effectively. To ensure that the parameters can converge to the true values, the persistent excitation condition is considered. Then, a self-adaption compensation controller is designed for eliminating the hysteresis nonlinearity in piezo-actuated stages. A merit of the proposed controller is that it can directly eliminate the complex hysteresis nonlinearity in piezo-actuated stages without any inverse dynamic models. To demonstrate the effectiveness of the proposed model and control methods, a set of comparative experiments are performed on piezo-actuated stages. Experimental results show that the proposed modeling and control methods have excellent performance.