Low Gate Capacitance IEGT with Trench Shield Emitter (IEGT-TSE) Realizing High Frequency Operation

被引:0
|
作者
Matsushita, Ken'ichi [1 ]
Ninomiya, Hideaki [1 ]
Naijo, Tatsuo [1 ]
Izumi, Masato [1 ]
Umekawa, Shinichi [1 ]
机构
[1] Toshiba Co Ltd, Semicond & Storage Prod Co, Taishi, Hyogo 6711595, Japan
来源
2013 25TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD) | 2013年
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel IEGT (Injection Enhanced Gate Transistor) design for drastically reducing of gate capacitance has been proposed in this work. The device structure named IEGT-TSE (IEGT with Trench Shield Emitter) has a dummy trench electrode connected to an emitter electrode. It shields gate electrode from floating p-well during switching. To demonstrate this effect, we exhibit switching waveforms by a numerical simulation and a fabricated device at 1200 blocking voltage class.
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页码:269 / 272
页数:4
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