Dynamic chromatic aberration correction in low energy electron microscopes

被引：3
|
作者：
Khursheed, A [1 ]
机构：
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2005年 / 23卷 / 06期
关键词：
D O I：
10.1116/1.2062432
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a method of dynamically correcting for the chromatic aberration in pulsed gun low energy electron microscope systems. The proposal is based upon the use of a drift tube in combination with electron lenses whose focal strengths can be rapidly modulated. Simulation results that use direct ray tracing of electrons are presented for specific drift tube/correction lens combinations. (c) 2005 American Vacuum Society.
引用
收藏
页码：2749 / 2753
页数：5
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