New CMP architecture addresses key process issues

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作者：

Worthington, E

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来源：

SOLID STATE TECHNOLOGY | 1996年 / 39卷 / 01期

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中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：61 / 62

页数：2

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