Surface topologies of thin aluminum films and absorbing properties of metal dielectric structures in the microwave range

被引:0
|
作者
Fitaev, Ibraim Shevketovich [1 ]
Orlenson, Vulf Borisrvich [1 ]
Romanets, Yuri Viktorovich [1 ]
Mazinov, Alim Seit-Ametovich [1 ]
机构
[1] VI Vernadsky Crimean Fed Univ, Simferopol 295007, Russia
关键词
D O I
10.1051/itmconf/20193008013
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
The paper presents experimental and theoretical results on the surface topography of thin aluminum films. The ambiguous topology dynamics of the thin-film structure is represented as a function of the increase in the bulk mass of the deposited material, which leads to an occasional rise in roughness reaching its maximum at a film thickness of 7 mn. At same time on the same thickness of the conductive layer the maximum of the absorption coefficient variability is observed. A theoretical analysis of the optical coefficients depending on the size of the conductive film substantiated the existence of extremes, but at smaller thicknesses.
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页数:6
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