Hydrogenated amorphous silicon carbon alloys for solar cells

被引：30
|
作者：
Ambrosone, G
Coscia, U
Lettieri, S
Maddalena, P
Privato, C
Ferrero, S
机构：
[1] Univ Naples Federico 2, INFM, Dipartimento Sci Fis, I-80126 Naples, Italy
[2] ENEA, I-80055 Portici, NA, Italy
[3] Politecn Torino, Dipartimento Fis, INFM, I-10129 Turin, Italy
来源：
THIN SOLID FILMS | 2002年 / 403卷
关键词：
silicon carbon; amorphous; optical properties; photoconductivity;
D O I：
10.1016/S0040-6090(01)01646-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Hydrogenated amorphous silicon carbon films were grown by PECVD from silane/methane gas mixtures by fixing the methane ratio in the gas phase and by changing the rf power and pressure. The effects of the discharge parameters on the optical, electrical and structural properties were investigated. These effects were attributed to the variation of carbon content in the film. The analyses enabled us to determine the optimal growth conditions to produce a-SiC:H materials, suitable in solar cell applications. with a good photosensitivity and low defect density of states. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：349 / 353
页数：5
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