Transmission-type optical sensors fabricated by Si micromachining

被引：0
|
作者：
Hane, K [1 ]
Sasaki, M [1 ]
机构：
[1] Tohoku Univ, Dept Mechatron & Precis Engn, Sendai, Miyagi 9808579, Japan
来源：
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年
关键词：
position sensor; optical encoder; interferometer;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
In this study, novel optical sensors fabricated by Si micromachinig are proposed. Unconventionally, the sensors have transmission structures. Only a part of the incident light beam is absorbed and the rest passes through the sensors. They enable to detect the information of the incident light beam not disturbing the optical field very much. Three examples are given in this paper, transmission position sensor, optical encoder, and interferometer.
引用
收藏
页码：524 / 527
页数：4
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