A microactuator for magnetic field control device with large shifting range

被引：0
|
作者：
Liu, Kun [1 ]
Cao, Yitong [1 ]
Yu, Huaiqiang [1 ]
Li, Zhihong [1 ]
机构：
[1] Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
来源：
2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013) | 2013年
关键词：
microactuator; low power consumption; electrostatic driven; ACTUATORS; MIRROR;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
A large tilting angle and zero static power consumption microactuator has been designed and fabricated in order to meet the requirement of low power consumption and remotely control systems. Analytical model and fabrication process flow of rotation actuator have been demonstrated, and static performance has been tested and compared to theoretical data. The results show the performance of our electrostatic driven device in good agreement with theoretical predicted model.
引用
收藏
页码：528 / 531
页数：4
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