Excess currents induced by hot-hole injection and F-N stress in thin SiO2 films

被引:0
|
作者
Teramoto, A [1 ]
Kobayashi, K [1 ]
Matsui, Y [1 ]
Hirayama, M [1 ]
Yasuoka, A [1 ]
机构
[1] MITSUBISHI ELECTR CORP,ULSI LAB,ITAMI,HYOGO 664,JAPAN
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:113 / 116
页数:4
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