Effect of Cage Configuration in Structural and Optical Properties of TiN Films Grown by Cathodic Cage Discharge

被引：3
|
作者：
Daudt, Natalia de Freitas [1 ]
Pereira Barbosa, Julio Cesar [2 ]
Cardoso Macedo, Marina de Oliveira [1 ]
Pereira, Marcelo Barbalho [3 ]
Alves Junior, Clodomiro [1 ]
机构：
[1] Univ Fed Rio Grande do Norte, Programa Posgrad Ciencia & Engn Mat, BR-59072970 Natal, RN, Brazil
[2] Univ Fed Rural Semiarido UFERSA, BR-59625900 Mossoro, RN, Brazil
[3] Univ Fed Rio Grande do Sul, BR-91501970 Porto Alegre, RS, Brazil
来源：
MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS | 2013年 / 16卷 / 04期
关键词：
cathodic cage; thin films; titanium nitride; Optical Emission Spectroscopy; plasma deposition; optical properties; TITANIUM NITRIDE COATINGS; STAINLESS-STEEL; PLASMA; SCREEN; HYDROGEN;
D O I：
10.1590/S1516-14392013005000065
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Cathodic cage discharge was developed recently in order to eliminate phenomena as edge effect and overheating, which occurs during conventional processes. In this study, the effect of cage configuration in active species during the deposition process and optical properties of TiN film were studied. TiN compound was chosen because its optical properties are very sensitive to slight variations in microstructure and film thickness, becoming a good monitoring tool in fabrication process control. Cages were made of titanium and have different holes numbers and holes diameter. Electrical efficiency of the system and optical properties of TiN films were strongly influenced by experimental conditions. It was found that with more holes at the top of cage, deposition rate and crystallinity were higher, if compared to cages with a small number of holes at the top. On the other hand, the opposite behavior was observed when more holes were located at the sidewall of cage.
引用
收藏
页码：766 / 771
页数：6
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