Fabrication of two-layer microphotonic structures without planarization

被引:0
|
作者
Qi, MH [1 ]
Watts, MR [1 ]
Barwicz, T [1 ]
Rakich, PT [1 ]
Socci, L [1 ]
Ippen, EP [1 ]
Smith, HI [1 ]
机构
[1] MIT, Res Lab Elect, Cambridge, MA 02139 USA
关键词
D O I
暂无
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A novel nanofabrication scheme for two-layer microphotonic structures were proposed and applied to the fabrication of integrated, mode-evolution-based polarization splitters and rotators. Prototype devices demonstrated effective splitting and rotating of polarization with low cross-talk. (c) 2005 Optical Society of America
引用
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页码:1288 / 1290
页数:3
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