Fast and low power Michelson interferometer thermo-optical switch on SOI

被引：171
|
作者：
Song, Junfeng [1 ,2 ]
Fang, Q. [1 ]
Tao, S. H. [1 ]
Liow, T. Y. [1 ]
Yu, M. B. [1 ]
Lo, G. Q. [1 ]
Kwong, D. L. [1 ]
机构：
[1] Agcy Sci Technol & Res, Inst Microelect, Singapore 117685, Singapore
[2] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130023, Peoples R China
来源：
OPTICS EXPRESS | 2008年 / 16卷 / 20期
关键词：
D O I：
10.1364/OE.16.015304
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We designed and fabricated silicon-on-insulator based Michelson interferometer (MI) thermo-optical switches with deep etched trenches for heat-isolation. Switch power was reduced similar to 20% for the switch with deep etched trenches, and the MI saved similar to 50% power than that of the Mach-Zehnder interferometer. 10.6 mW switch power, similar to 42 mu s switch time for the MI with deep trenches, 13.14 mW switch power and similar to 34 mu s switch time for the MI without deep trenches were achieved. (C) 2008 Optical Society of America
引用
收藏
页码：15304 / 15311
页数：8
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