PLD and RF-PLD synthesis of Ba0.6Sr0.4TiO3 ferroelectric thin films for electrically controlled devices

被引：6

作者：

Nedelcu, L. ^{[1
]}

Ioachim, A. ^{[1
]}

Toacsan, M. I. ^{[1
]}

Banciu, M. G. ^{[1
]}

Pasuk, I. ^{[1
]}

Buda, M. ^{[1
]}

Scarisoreanu, N. ^{[2
]}

Ion, V. ^{[2
]}

Dinescu, M. ^{[2
]}

机构：

[1] Natl Inst Mat Phys, Bucharest 077125, Romania

[2] Natl Inst Lasers Plasma & Radiat Phys, Bucharest 077125, Romania

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 93卷 / 03期

关键词：

D O I：

10.1007/s00339-008-4694-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ba0.6Sr0.4TiO3 (BST) bulk ceramic synthesized by solid state reaction was used as target for thin films grown by pulsed laser deposition (PLD) and radiofrequency beam assisted PLD (RF-PLD). The X-ray diffraction patterns indicate that the films exhibit a polycrystalline cubic structure with a distorted unit cell. Scanning Electron Microscopy investigations showed a columnar microstructure with size of spherical grains up to 150 nm. The capacitance-voltage (C-V) characteristics of the BST films were performed by applying a DC voltage up to 5 V. A value of 280 for dielectric constant and 12.5% electrical tunability of the BST capacitor have been measured at room temperature.

引用

页码：675 / 679

页数：5

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