Grain contrast imaging in FIB and SEM

被引:19
|
作者
Canovic, S. [1 ]
Jonsson, T. [1 ]
Halvarsson, M. [1 ]
机构
[1] Chalmers, Dept Appl Phys, SE-41296 Gothenburg, Sweden
关键词
D O I
10.1088/1742-6596/126/1/012054
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Grain contrast imaging can be performed with several techniques. In order to be able to choose the most suitable one it is important to know which techniques are available and also to be aware of the strengths and weaknesses of each technique. In this work, the grain contrast imaging is performed with secondary electrons, backscattered electrons, forward scattered electrons, transmitted electrons in the scanning electron microscope, and with secondary electrons in the focused ion beam instrument. The advantages and disadvantages of each method are discussed in order to make it easier to choose the most appropriate technique for grain contrast imaging.
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收藏
页数:4
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