Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared

被引:120
|
作者
Shankar, Raji [1 ]
Bulu, Irfan [1 ]
Loncar, Marko [1 ]
机构
[1] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA
关键词
WAVE-GUIDES;
D O I
10.1063/1.4791558
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate high-quality (Q) factor grating-coupled ring resonators in a silicon-on-sapphire platform, operating at wavelengths between 4.3 and 4.6 mu m. Total Q-factors of 151 000 and intrinsic Q-factors of 278 000 are measured, representing the highest Q-factors measured at the mid-infrared in Si. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4791558]
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页数:3
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