MEMS switch for wireless communication circuits: Fabrication process and simulation

被引：0

作者：

Kretly, LC ^{[1
]}

Tavora, A ^{[1
]}

Capovilla, CE ^{[1
]}

机构：

[1] Univ Estadual Campinas, DMO, BR-13082970 Campinas, SP, Brazil

来源：

2005 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference (IMOC) | 2005年

关键词：

microelectromechanical devices; coplanar waveguides; fabrication; wireless; microwave circuits;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the process and methodology adopted for the design of a MEMS (Micro Electro Mechanical System) switch in coplanar microstrip lines. The design proposed in this paper is the metallic bridge over a coplanar microstrip line suspended in both sides by two metallic posts. These MEMS switches are designed for operation at S band satisfying the implementation requirements for Bluetooth and WLAN systems giving the possibility of operation in two protocols: IEEE 802.11b up to 11 Mb/s bit rate (commonly named Wi-Fi) and 802.11b up to 54 Mb/s, recently approved with significant rise in data rate when compared to the 802.11b. The S parameters and electromechanical displacement simulations are also presented.

引用

页码：425 / 427

页数：3

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