Epitaxy of Si-Ge-Sn-based heterostructures for CMOS-integratable light emitters

被引:16
|
作者
von den Driesch, Nils [1 ,2 ,3 ]
Stange, Daniela [2 ,3 ]
Rainko, Denis [2 ,3 ]
Breuer, Uwe [4 ]
Capellini, Giovanni [5 ,6 ]
Hartmann, Jean-Michel [7 ]
Sigg, Hans [8 ]
Mantl, Siegfried [2 ,3 ]
Gruetzmacher, Detlev [1 ,2 ,3 ]
Buca, Dan [2 ,3 ]
机构
[1] Rhein Westfal TH Aachen, JARA Inst Green IT, Aachen, Germany
[2] Forschungszentrum Julich, PGI 9, D-52425 Julich, Germany
[3] Forschungszentrum Julich, JARA FIT, D-52425 Julich, Germany
[4] Forschungszentrum Julich, Cent Inst Engn Elect & Analyt ZEA 3, D-52425 Julich, Germany
[5] IHP Microelect, D-15236 Frankfurt, Oder, Germany
[6] Univ Roma Tre, Dept Sci, I-00154 Rome, Italy
[7] Univ Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France
[8] PSI, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
关键词
MU-M; LEDS;
D O I
10.1016/j.sse.2019.03.013
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The recent rise of GeSn-based optically pumped lasers have multiplied the efforts to fabricate a fully CMOS compatible and group IV-based light emitter. Their integration with Si-based electronics may yield heavily reduced power consumption in integrated circuits and pave the way towards new sensing or medical applications. Here, we discuss the epitaxy of group IV GeSn and SiGeSn semiconductors and show their suitability for light emitting applications. Double and multi quantum well heterostructures are evaluated, whereby the latter enables an inherently easier control over the formation of deleterious misfit defects. Consequently, microdisk lasers fabricated from those show greatly enhanced light emission and reduced lasing thresholds. The use of in-situ p-i-n doping schemes allow the formation of light emitting diodes, resulting in electrically-enabled light emission already at room temperature.
引用
收藏
页码:139 / 143
页数:5
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