Direct patterning of indium tin oxide layer in plasma display panel using Nd:YVO4 laser

被引：0
|
作者：
Kim, K. H. [1 ]
Ahn, M. H. [1 ]
Kwon, S. J. [1 ]
机构：
[1] Kyungwon Univ San, Dept Elect Engn, Seongnam Sity 461701, Kyunggi Do, South Korea
来源：
IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3 | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Maskless laser direct patterning ITO films was experimented using a Q-switched Nd:YVO4 laser for the fabrication of PDP bus electrodes. The laser ablated ITO patterns showed the formation of shoulders at the edge of the ITO lines and the ripple-like structure with the etched bottom.
引用
收藏
页码：873 / 876
页数：4
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