Nanometer-scale tunnel formation in metallic glass by helium ion irradiation

被引:14
|
作者
Shao, Lin [1 ,2 ]
Gorman, Brian P. [3 ]
Aitkaliyeva, Assel [2 ]
Theodore, N. David [4 ]
Xie, Guoqiang [5 ]
机构
[1] Texas A&M Univ, Dept Nucl Engn, College Stn, TX 77843 USA
[2] Texas A&M Univ, Mat Sci & Engn Program, College Stn, TX 77843 USA
[3] Colorado Sch Mines, Dept Met & Mat Engn, Golden, CO 80401 USA
[4] Freescale Semicond Inc, CHD Fab, Chandler, AZ 85224 USA
[5] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan
基金
美国国家科学基金会;
关键词
ELECTRON-IRRADIATION; GAS-BUBBLES; ALLOY; CRYSTALLIZATION;
D O I
10.1063/1.4734399
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have shown that upon high fluence helium ion irradiation, metallic glass Cu50Zr45Ti5 becomes highly porous at the depth of the helium projected range. The resulting porous region is characterized by the formation of a tunnel like structure and self-linkage of nanometer size gas bubbles. Furthermore, the irradiation leads to the formation of nanometer size CuxZry crystals that are randomly distributed. The results of this study indicate that the He-filled bubbles have attractive interactions and experience considerable mobility. Movement of the bubbles is believed to be assisted by ballistic collisions. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4734399]
引用
收藏
页数:4
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