Characterization of carbon nanotubes and carbon nitride nanofibres synthesized by PECVD

被引：8
|
作者：
Point, S. [1 ]
Minea, T. [1 ]
Besland, M. -P. [1 ]
Granier, A. [1 ]
机构：
[1] IMN Nantes, Inst Mat Jean Rouxel, F-44322 Nantes, France
来源：
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS | 2006年 / 34卷 / 02期
关键词：
D O I：
10.1051/epjap:2006051
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
This paper presents a novel dual plasma enhanced chemical vapor deposition ( PECVD) process developed to grow carbon nitride nanofibres ( CN-NFs) at room temperature ( RT) and its basic version used to grow multi-walled carbon nanotubes ( MWCNTs) at temperatures as low as 550 degrees C. The dual process alternates two low pressure-high density plasmas, one inductively coupled ( ICP) and the other one excited by distributed electron cyclotron resonance ( DECR). MWCNTs can be synthesized using only the DECR plasma source. The paper focuses on the comparison between CN-NFs and MWCNTs detailing their structure as revealed by transmission electron microscopy ( TEM), X-ray photo electron spectroscopy ( XPS) and Raman spectroscopy.
引用
收藏
页码：157 / 163
页数：7
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