Non-Conventional Characterization of Electrically Active Dopant Profiles in Al-Implanted Ge by Depth-Resolved Micro-Raman Spectroscopy

被引：5

作者：

Sanson, Andrea ^{[1
]}

Napolitani, Enrico ^{[2
]}

Giarola, Marco ^{[3
]}

Impellizzeri, Giuliana ^{[4
]}

Privitera, Vittorio ^{[4
]}

Mariotto, Gino ^{[3
]}

Carnera, Alberto ^{[1
]}

机构：

[1] Univ Padua, Dipartimento Fis & Astron, I-35131 Padua, Italy

[2] Univ Padua, CNR IMM MATIS, Dipartimento Fis & Astron, I-35131 Padua, Italy

[3] Univ Verona, Dipartimento Informat, I-37134 Verona, Italy

[4] Univ Catania, CNR IMM MATIS, Dipartimento Fis & Astron, I-95123 Catania, Italy

来源：

APPLIED PHYSICS EXPRESS | 2013年 / 6卷 / 04期

关键词：

P-TYPE SI; GERMANIUM; SILICON; STRESS;

D O I：

10.7567/APEX.6.042404

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Al-implanted Ge samples were investigated by micro-Raman spectroscopy combined with a small angle beveling technique. By means of a reverse Monte Carlo procedure, the concentration profiles of the electrically active dopant ions were determined from the Raman peak observed at similar to 370 cm(-1) related to substitutional Al atoms. Furthermore, a clear relationship between the Ge-Ge Raman peak at similar to 300 cm(-1) and the active dopant concentration was also observed. This work shows that micro-Raman spectroscopy could be adopted for quantitative characterizations of the carrier concentration profiles in extrinsic semiconductors. (C) 2013 The Japan Society of Applied Physics

引用

页数：4

共 6 条

[1] Study of carrier concentration profiles in Al-implanted Ge by micro-Raman spectroscopy under different excitation wavelengths
Sanson, A.
Giarola, M.
Napolitani, E.
Impellizzeri, G.
Privitera, V.
Carnera, A.
Mariotto, G.
JOURNAL OF RAMAN SPECTROSCOPY, 2013, 44 (05) : 665 - 669
[2] A non-destructive approach for doping profiles characterization by micro-Raman spectroscopy: the case of B-implanted Ge
Sanson, A.
Napolitani, E.
Carnera, A.
Impellizzeri, G.
Giarola, M.
Mariotto, G.
JOURNAL OF RAMAN SPECTROSCOPY, 2014, 45 (02) : 197 - 201
[3] Depth analysis of a compression layer in chemically strengthened glass using depth-resolved micro-Raman spectroscopy
Terakado, Nobuaki
Uchida, Shohei
Takahashi, Yoshihiro
Fujiwara, Takumi
Arakawa, Mototaka
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2016, 124 (10) : 1164 - 1166
[4] Depth-resolved confocal micro-Raman spectroscopy for characterizing GaN-based light emitting diode structures
Chen, Wei-Liang
Lee, Yu-Yang
Chang, Chiao-Yun
Huang, Huei-Min
Lu, Tien-Chang
Chang, Yu-Ming
REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (11):
[5] Depth-resolved in vivo micro-Raman spectroscopy of a murine skin tumor model reveals cancer-specific spectral biomarkers
Wang, Hequn
Huang, Naiyan
Zhao, Jianhua
Lui, Harvey
Korbelik, Mladen
Zeng, Haishan
JOURNAL OF RAMAN SPECTROSCOPY, 2011, 42 (02) : 160 - 166
[6] Depth-resolved micro-Raman spectroscopy of tri-layer PFSA membrane for PEM fuel cells: how to obtain reliable inner water contents
Peng, Z.
Huguet, P.
Deabate, S.
Morin, A.
Sutor, A. K.
JOURNAL OF RAMAN SPECTROSCOPY, 2013, 44 (02) : 321 - 328

← 1 →