Surface profile measurement based on continuous wavelet transform in line-scan dispersive interferometry

被引：0
|
作者：
Zhao, Guanhua [1 ]
Guo, Tong [1 ]
Weng, Qianwen [1 ]
机构：
[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China
来源：
2019 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS | 2020年 / 11439卷
关键词：
Line-scan dispersive interferometry; surface profile measurement; continuous wavelet transform; INSPECTION;
D O I：
10.1117/12.2540385
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper presents a signal processing method based on continuous wavelet transform in our line-scan dispersive interferometric system. Our method enables us to extract phase information from the spectrum by applying continuous wavelet transform, which is more effective and reliable in analyzing non-stationary signal compared with FT transform. Experimental results obtained by measuring a step standard with a height of 1.806 mu m reveal that this method has high accuracy and a good performance over noise resistance, which makes it suitable for complicated in-line measurement condition.
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收藏
页数：8
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