Platinum surface additive based nanostructured CuO films for ethanol sensing

被引：0
|
作者：
Parmar, Mitesh [1 ,2 ]
Rajanna, K. [2 ]
机构：
[1] Chonnam Natl Univ, Sch Mech Engn, MEMS & Nanotechnol Lab, Natl Lab, 1A-301,300 Yongbong Dong, Kwangju 500757, South Korea
[2] Indian Inst Sci, Dept Instrumentat & Appl Phys, Bangalore 560012, Karnataka, India
来源：
2012 IEEE SENSORS PROCEEDINGS | 2012年
关键词：
CO OXIDATION; GAS SENSORS; THIN-FILM; CATALYST;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In the present work, Platinum (Pt)/Copper (II) oxide (CuO) thin film based ethanol sensors were fabricated by sputtering of Pt in varying concentrations over pre-sputtered nanostructured CuO films. The responses of these sensors as a function of Pt concentrations were studied using operating temperature modulation (200-450 degrees C) and ethanol concentration modulation (100-2500 ppm). During these modulations, it was found that the sensing response was maximum at operating temperature near 400 degrees C for all the samples irrespective of the Pt concentration dispersed over them. Moreover, the sensing behavior improves for lower Pt concentration (Pt/CuO-60s) and deteriorates for higher Pt concentration (Pt/CuO-120s). In comparison with bare CuO sample, the sensitivity of Pt/CuO-60s increased up to 22% in the linear range and 33% for maximum ethanol concentration. Hence, the well dispersed optimum Pt additive concentration improves the overall sensing behavior including sensitivity, linear working range and response as well as recovery time.
引用
收藏
页码：1228 / 1231
页数：4
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