Properties of thin coating deposited on tool steel after different technological conditions of physical vapour deposition process

Microhardness and scratch adhesion testing are two basic techniques, which are often used for determination of mechanical properties. The microhardness of coatings was assessed by nanoindentor. The adhesion of the coating to the substrate was measured by scratch test. The thin, TiAlN-based coatings were deposited by PVD (Physical Vapour Deposition) process with different values of accelerating bias voltage of substrate. Structure of the coating was determined by SEM microscopy.