Laser probing and FEM modeling of solidly mounted resonators

被引:0
|
作者
Tikka, PT [1 ]
Kaitila, J [1 ]
Ellä, J [1 ]
Makkonen, T [1 ]
Knuuttila, JV [1 ]
Westerholm, J [1 ]
Salomaa, MM [1 ]
机构
[1] Helsinki Univ Technol, Mat Phys Lab, FIN-02015 Hut, Finland
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The ultrasonic vibrations of a solidly mounted resonator are probed utilizing a scanning laser interferometric technique. The vibrations are also simulated using a model of a solidly mounted resonator and applying 2D FEM modeling for the solution of the eigenmodes.
引用
收藏
页码:1373 / 1376
页数:4
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