Low loss high index contrast nanoimprinted polysiloxane waveguides

被引：35

作者：

Han, Ting ^{[1
]}

Madden, Steve ^{[1
]}

Zhang, Mathew ^{[1
]}

Charters, Robbie ^{[2
]}

Luther-Davies, Barry ^{[1
]}

机构：

[1] Australian Natl Univ, Laser Phys Ctr, Canberra, ACT 0200, Australia

[2] RPO Inc, Canberra, ACT 0200, Australia

来源：

OPTICS EXPRESS | 2009年 / 17卷 / 04期

基金：

澳大利亚研究理事会;

关键词：

FABRICATION; LAYER;

D O I：

10.1364/OE.17.002623

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Nanoimprint lithography is gaining rapid acceptance in fields as diverse as microelectronics and microfluidics due to its simplicity high resolution and low cost. These properties are critically important for the fabrication of photonic devices, where cost is often the major inhibiting deployment factor for high volume applications. We report here on the use of nanoimprint technology to fabricate low loss broadband high index contrast waveguides in a Polysiloxane polymer system for the first time. (C) 2009 Optical Society of America

引用

页码：2623 / 2630

页数：8

共 50 条

[1] High index contrast polysiloxane waveguides fabricated by dry etching
Madden, S. J.
Zhang, M. Y.
Choi, D. -Y.
Luther-Davies, B.
Charters, R.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (03): : 561 - 565
[2] Integrated laser with low-loss high index-contrast waveguides for OEICs
Welty, RJ
Bond, TC
Behymer, E
Pocha, M
Loomis, G
Wolfe, J
Vernon, S
Optoelectronic Integrated Circuits VII, 2005, 5729 : 49 - 60
[3] Low bend loss waveguides and photonic bandgaps enabled by high index contrast modifications
Gross, Simon
Arriola, Alexander
Jovanovic, Nemanja
Charles, Ned
Tuthill, Peter G.
Olaizola, Santiago M.
Fuerbach, Alexander
Withford, Michael J.
PROGRESS IN ULTRAFAST LASER MODIFICATIONS OF MATERIALS, 2013, 8
[4] Low-loss high-index-contrast planar waveguides with graded-index cladding layers
Hu, Juejun
Feng, Ning-Ning
Carlie, Nathan
Petit, Laeticia
Wang, Jianfei
Agarwal, Anu
Richardson, Kathleen
Kimerling, Lionel
OPTICS EXPRESS, 2007, 15 (22) : 14566 - 14572
[5] Radiation modes and roughness loss in high index-contrast waveguides
Poulton, Christopher G.
Koos, Christian
Fujii, Masafumi
Pfrang, Andreas
Schimmel, Thomas
Leuthold, Juerg
Freude, Wolfgang
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2006, 12 (06) : 1306 - 1321
[6] LOW LOSS HIGH INDEX CONTRAST POLYMERIC WAVEGUIDE
Bin Nun, Moran
Marom, Dan M.
2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014, : 197 - 198
[7] Low Cost Nanoimprinted Polymer Waveguides
Han, Ting
Madden, Steve
Zhang, Mathew
Charters, Robbie
Luther-Davies, Barry
COMMAD: 2008 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS & DEVICES, 2008, : 185 - +
[8] Light guiding in low index materials using high-index-contrast waveguides
Almeida, VR
Xu, QF
Panepucci, RR
Barrios, CA
Lipson, M
ENGINEERED POROSITY FOR MICROPHOTONICS AND PLASMONICS, 2004, 797 : 121 - 126
[9] 90° bends in low index contrast waveguides
Li, LX
Nordin, GP
English, JM
Jiang, JH
INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES VII, 2003, 4987 : 106 - 113
[10] High-index and low loss polyethylene terephatate optical waveguides
Low, ALY
Singh, GK
Yong, YS
OPTICAL AND QUANTUM ELECTRONICS, 2004, 36 (11) : 997 - 1003

← 1 2 3 4 5 →