Aligned implantation via integrated scanning probe FABRICATION & PROCESSING

被引:0
|
作者
Telford, Mark
机构
关键词
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:10 / 10
页数:1
相关论文
共 50 条
  • [1] Fabrication of individual aligned carbon nanotube for scanning probe microscope
    Tseng, SC
    Tsai, CH
    Lee, CH
    Tsai, CH
    Chen, SP
    Liang, CC
    Hsieh, GW
    Line, WC
    SECOND CONFERENCE ON MICROELECTRONICS, MICROSYSTEMS AND NANOTECHNOLOGY, 2005, 10 : 186 - 189
  • [2] Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation
    Persaud, A.
    Ivanova, K.
    Sarov, Y.
    Ivanov, Tzv.
    Volland, B. E.
    Rangelow, I. W.
    Nikolov, N.
    Schenkel, T.
    Djakov, V.
    Jenkins, D. W. K.
    Meijer, J.
    Vogel, T.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (06): : 3148 - 3151
  • [3] Integrated cantilever fabrication and system development for ultrasonic and acoustic scanning probe microscopy
    Olson, S
    Sankaran, B
    Altemus, B
    Xu, B
    Geer, R
    Testing, Reliability, and Application of Micro- and Nano-Material Systems III, 2005, 5766 : 159 - 167
  • [4] Ion implantation with scanning probe alignment
    Persaud, A
    Liddle, JA
    Schenkel, T
    Bokor, J
    Ivanov, T
    Rangelow, IW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (06): : 2798 - 2800
  • [5] Design and fabrication of microcantilever probe integrated with microplasma reactor for maskless scanning plasma etching
    Wen, Li
    Wang, Hai
    He, Liwen
    Zhang, Qiuping
    Xiang, Weiwei
    Chu, Jiaru
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 169 (02) : 362 - 366
  • [6] Single ion implantation with scanning probe alignment
    Persaud, A
    Allen, FI
    Giccluel, F
    Park, SJ
    Liddle, JA
    Schenkel, T
    Ivanov, T
    Ivanova, K
    Rangelow, IW
    Bokor, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (06): : 2992 - 2994
  • [7] Fabrication of hierarchical micro/nanostructures via scanning probe lithography and wet chemical etching
    Choi, Inhee
    Kim, Younghun
    Yi, Jongheop
    ULTRAMICROSCOPY, 2008, 108 (10) : 1205 - 1209
  • [8] Noble metal nanostructures on semiconductor substrates: Fabrication via scanning probe nanolithography.
    Porter, LA
    Ribbe, AE
    Buriak, JM
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 227 : U1454 - U1454
  • [9] Scanning probe microscopy with integrated biosensors
    Kueng, A
    Kranz, C
    Mizaikoff, B
    SENSOR LETTERS, 2003, 1 (01) : 2 - 15
  • [10] FABRICATION OF TUNNEL BARRIER BY SCANNING PROBE LITHOGRAPHY
    Pavlova, A. Yu.
    Khivintsev, Yu. V.
    Filimonov, Yu. A.
    Zaharov, A. A.
    Tiercelin, N.
    Pernod, P.
    2012 INTERNATIONAL CONFERENCE ON ACTUAL PROBLEMS OF ELECTRON DEVICES ENGINEERING (APEDE 2012), 2012, : 377 - 380