Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region

被引：141
|
作者：
Yamaguchi, M
Suezawa, K
Arai, KI
Takahashi, Y
Kikuchi, S
Shimada, Y
Li, WD
Tanabe, S
Ito, K
机构：
[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Tohoku Gakuin Univ, Dept Elect Engn, Tagajo, Miyagi 9858537, Japan
[3] Tohoku Univ, Sci Measurements Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
[4] Mitsubishi Elect Corp, Amagasaki, Hyogo 6610001, Japan
来源：
JOURNAL OF APPLIED PHYSICS | 1999年 / 85卷 / 11期
关键词：
D O I：
10.1063/1.370608
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Thin-film inductors for 1 GHz-drive mobile communication handset application has been demonstrated. This is the possible practical application of soft magnetic films in 1 GHz range. Fe61Al13O26 with M-s = 1.2 T, rho = 500 mu Omega cm, f(r) = 2 GHz were used for the inductors. L = 7.6 nH, R = 6.5 Omega, and Q = 7.4 were obtained at 1 GHz in a 370 mu m x 370 mu m square four turn spiral of line/space = 11 mu m/11 mu m covered with 0.1-mu m-thick slitted Fe61Al13O26 film with Cr underlayer. The L was increased over the flux saturated inductor by 8.6% without any degrade of quality factor. (C) 1999 American Institute of Physics. [S0021-8979(99)05811-9].
引用
收藏
页码：7919 / 7922
页数：4
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