High extinction ratio polarization beam splitter with multimode interference coupler on SOI

被引：61
|
作者：
Huang, Yawen [1 ]
Tu, Zhao [1 ]
Yi, Huaxiang [1 ]
Li, Yanping [1 ]
Wang, Xingjun [1 ]
Hu, Weiwei [1 ]
机构：
[1] Peking Univ, State Key Lab Adv Opt Commun Syst & Networks, Beijing 100871, Peoples R China
来源：
OPTICS COMMUNICATIONS | 2013年 / 307卷
基金：
中国国家自然科学基金; 国家高技术研究发展计划(863计划);
关键词：
Polarization beam splitter (PBS); Multimode interference (MMI); Silicon-on-insulator (SOI); Quasi-state imaging; WAVE-GUIDES; DESIGN; CRYSTAL; DEVICES;
D O I：
10.1016/j.optcom.2013.05.055
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A high extinction ratio polarization beam splitter based on multimode interference coupler has been obtained on silicon-on-insulator. The multimode interference coupler is designed by using quasi-state imaging theory, and fabricated with E-beam lithography and induced coupled plasma etching technology. The device has footprint of 8.16 mu m x 1034 mu m. The measured extinction ratios remain 45 dB for TE mode and 23 dB for TM mode at wavelength of 1.55 mu m. The extinction ratio of more than 20 dB for TE mode and 15 dB for TM mode is observed covering the whole C-band. (C) 2013 Elsevier By. All rights reserved.
引用
收藏
页码：46 / 49
页数：4
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