Research on high precision displacement sensor based on optical arm amplification

With the continuous development of optoelectronic information technology, modern manufacturing industry has higher requirements on the response speed, precision and resolution of sensors. A new high-precision continuous displacement sensor is proposed by combining the amplification principle of optical arm with the traditional position sensitive detector (PSD) in this paper. By using the principle of optical triangle amplification, the tiny displacement is transformed to the long side of the triangle, and the reflected laser is measured by the position sensitive detector to obtain the laser displacement of the long side. The structure of triangular wave optical reflector combined with dislocation multi-probe is adopted to realize alternating displacement measurement and extend the measuring range of the sensor. The experimental results show that the measurement principle proposed in this paper is correct, and the low-cost precision measurement of 1 mu m is preliminarily realized.