Multi-scale graphene patterns on arbitrary substrates via laser-assisted transfer-printing process

被引:31
|
作者
Park, J. B. [1 ]
Yoo, J. -H. [1 ]
Grigoropoulos, C. P. [1 ]
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
关键词
FILMS;
D O I
10.1063/1.4738883
中图分类号
O59 [应用物理学];
学科分类号
摘要
A laser-assisted transfer-printing process is developed for multi-scale graphene patterns on arbitrary substrates using femtosecond laser scanning on a graphene/metal substrate and transfer techniques without using multi-step patterning processes. The short pulse nature of a femtosecond laser on a graphene/copper sheet enables fabrication of high-resolution graphene patterns. Thanks to the scale up, fast, direct writing, multi-scale with high resolution, and reliable process characteristics, it can be an alternative pathway to the multi-step photolithography methods for printing arbitrary graphene patterns on desired substrates. We also demonstrate transparent strain devices without expensive photomasks and multi-step patterning process. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4738883]
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页数:4
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