Design of Compact and Easy-fabricated Polarization Splitter-rotator Based on Slotted Waveguide

A compact and easy-fabricated polarization splitter-rotator (PSR) using SiO2 top-cladding directional coupler with a slotted waveguide is proposed and characterized. The proposed device can be easily fabricated with CMOS technology as only one regular slot needs to be etched on a silicon nanowire. Compact size of 42 mu m device length at 1.55 prm is realized after the optimizing process while the maximum power conversion efficiency is achieved as high as 94%. With the length variation of +/- 5 mu m, the conversion efficiency is still larger than 91%, which shows a large fabrication tolerance. The influence of the slot center deviation on conversion efficiency and the bandwidth of the device are also investigated.