Multi-Degree-of-Freedom Motion Control of Ultra-precision Stage

被引：0

作者：

Teng Wei ^{[1
]}

Gao Qingfeng ^{[1
]}

Wu Xin ^{[1
]}

Liu Yibing ^{[1
]}

机构：

[1] N China Elect Power Univ, Sch Energy Power & Mech Engn, Beijing 102206, Peoples R China

来源：

2011 30TH CHINESE CONTROL CONFERENCE (CCC) | 2011年

关键词：

Ultra-Precision; Stage; Decouple Control; Follow;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, a ultra-precision multi-degree-of-freedom stage is introduced, which consists of fine-stage based on Lorentz planar motor and rough-stage based on linear motor, and is suspended with air bearings. Based on the structure of stage, the dynamic model of fine-stage is designed, and the strategy of decouple control is presented correspondingly. A control method rough-stage following fine-stage is designed to satisfy the long stroke and high-precision performances. The above method is argued by field experiments, which demonstrates that the structure of stage and the control method can realize the performances of high-speed, long stroke and ultra-precision.

引用

页码：3585 / 3588

页数：4