Second layer nucleation in thin film growth

被引:56
|
作者
Rottler, J [1 ]
Maass, P [1 ]
机构
[1] Univ Konstanz, Fak Phys, D-78457 Constance, Germany
关键词
D O I
10.1103/PhysRevLett.83.3490
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We study the second layer nucleation on top of islands emerging Juring epitaxial growth of thin films. By employing kinetic Monte Carlo simulations we determine the critical island radius R-c upon which small stable nuclei form in the second laver. We find that the dependence of R,, on the additional step edge barrier Delta E-s (Schwoebel barrier) is not in accordance with existing theories. Scaling arguments are presented which explain how R-c depends on Delta E-s as well as on adatom diffusion rates and on the incoming atom flux. Based on the theory, the occurrence of smooth layer-by-layer growth as opposed to rough multilayer growth is discussed.
引用
收藏
页码:3490 / 3493
页数:4
相关论文
共 50 条
  • [1] THEORY OF NUCLEATION AND GROWTH OF A THIN FILM
    KIKUCHI, R
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1967, S : 605 - &
  • [2] Statistics of second layer nucleation in heteroepitaxial growth
    Filimonov, SN
    Hervieu, YY
    SURFACE SCIENCE, 2002, 507 : 270 - 275
  • [3] Nonextensive treatment of nucleation and growth in a thin layer
    Cetinel, Hakan
    Kayacan, Ozhan
    PHYSICA A-STATISTICAL MECHANICS AND ITS APPLICATIONS, 2007, 374 (01) : 263 - 271
  • [4] NUCLEATION FIELD OF A THIN SUPERCONDUCTING FILM ON A THICK NORMAL LAYER
    FINK, HJ
    MARTINOL.P
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1971, 16 (03): : 332 - &
  • [5] The influence of enhanced nucleation on thin-film growth
    Breeman, M
    Michely, T
    Comsa, G
    SURFACE SCIENCE, 1997, 370 (01) : L193 - L200
  • [6] Nucleation Field of a Thin Superconducting Film on a Thick Normal Layer
    Fink, H. J.
    Martinoli, P.
    JOURNAL OF LOW TEMPERATURE PHYSICS, 1971, 4 (03) : 305 - 315
  • [7] Island nucleation in metal thin-film growth
    Fichthorn, KA
    Merrick, ML
    Pentcheva, R
    Scheffler, M
    ATOMISTIC ASPECTS OF EPITAXIAL GROWTH, 2002, 65 : 87 - 97
  • [8] Effects of plasma in nucleation process of thin film growth
    Imamura, N
    Asatani, S
    Hashiguchi, S
    Terada, N
    Furukawa, Y
    Obara, K
    SURFACE & COATINGS TECHNOLOGY, 2003, 169 : 61 - 64
  • [9] Investigation of the nucleation and growth of thin-film phosphors
    Moss, TS
    Springer, RW
    Peachey, NM
    Dye, RC
    FLAT PANEL DISPLAY MATERIALS II, 1997, 424 : 459 - 464
  • [10] Nucleation theory and the early stages of thin film growth
    Ratsch, C
    Venables, JA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (05): : S96 - S109