0.35μm, 30V Fully Isolated and Low-Ron nLDMOS for DC-DC Applications

被引:0
|
作者
Lee, Kyungho [1 ]
Jeon, Haeung [1 ]
Cho, Byunghee [1 ]
Cho, Joonhee [1 ]
Pang, Yon-Sup [1 ]
Moon, Jinwoo [1 ]
Kwon, Susanna [1 ]
Hebert, Francois [1 ]
Lee, Junghwan [1 ]
Lee, Taejong [1 ]
机构
[1] Magnachip Semicond, Corp Engn Div, Cheongju 361728, Chungcheongbuk, South Korea
来源
2013 25TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD) | 2013年
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we present a new approach to integrate in a 0.35 mu m BCD technology, low Ron LDMOS power transistors with highly competitive Specific Resistance figure of merit (Rsp, defined as Ron*Area). The LDMOS are fully isolated in order to support applications which may bias the source/drain electrodes below the substrate potential, which is critical for devices used in high-current, high- frequency switching applications. The new devices are suitable for high-efficiency DC-DC converter products with operating voltage of up to 30V, such as mobile PMICs. For maximum performance, two different extended-drain LDMOS structures have been developed to cover the entire operating voltage range: for 16V and below, a planar-gate structure is used and for 20V and above, a non-planar "offset-LOCOS" gate is used for 20V and above.
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页码:163 / 166
页数:4
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