Effects of CrRu underlayer and CrRu capped layer on the microstructure and magnetic properties of FePt films

被引:2
|
作者
Chen, S. C. [1 ]
Kuo, P. C.
Lee, C. T.
Sun, A. C.
Chou, C. Y.
Fang, Y. H.
机构
[1] MingChi Univ Technol, Dept Mat Engn, Taipei 243, Taiwan
[2] Natl Taiwan Univ, Inst Mat Sci & Engn, Taipei 106, Taiwan
[3] Natl Taiwan Univ, Ctr Nanostorage Res, Taipei 106, Taiwan
关键词
CrRu/FePt bilayer; CrRu/FePt/CrRu trilayer; in-plane coercivity; magnetron sputtering;
D O I
10.1109/TMAG.2006.888487
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The magnetic properties and microstructure of CrRu/FePt bilayer and CrRu/FePt/CrRu trilayer deposited by dc magnetron sputtering on preheated natural-oxidized Si (100) wafer substrates were studied. It is found that both the in-plane coercivity (Hc(//)) and grain size of the FePt film increase with increasing the thickness of CrRu underlayer. The Hc(//) value of the FePt film is further increased but the grain size is decreased as adding a CrRu capped layer on the FePt film. The granular L1(0) FePt nanoparticles with in-plane coercivity of 2300 Oe and isolated uniform size of 6.61 nm are achieved from the CrRu(15 nm)/FePt(25 nm)/CrRu(4 nm) film deposited at a low substrate temperature of 350 degrees C.
引用
收藏
页码:876 / 878
页数:3
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