Identification of artefacts in Auger electron spectroscopy due to surface topography

Surface analysis using Auger electron spectroscopy is a highly accurate technique. However, its application to sharp topographies results in artefacts that could lead to a change of the collected Auger signal by more than 100% of the true elemental concentration. Such a geometry is representative of micro-fabricated field emission structures. A new multi-channel detector spanning 360 degrees of azimuth angle in six segments has been developed for the rapid identification of edge artefacts when analysed using a cylindrical mirror analyser. The Auger electron signal from a tungsten coated volcano-shaped silicon field emitter structure shows Auger electron signal enhancement of x2 on opposing sides.