Separation of ion components produced by plasma-assisted catalytic ionization

被引:9
|
作者
Oohara, W. [1 ]
Hibino, T. [1 ]
Higuchi, T. [1 ]
Ohta, T. [1 ]
机构
[1] Yamaguchi Univ, Dept Elect Device Engn, Ube, Yamaguchi 7558611, Japan
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 08期
关键词
ELECTRON-POSITRON PLASMAS; HIGH-INTENSITY; MODES;
D O I
10.1063/1.4748273
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Positive and negative hydrogen ions are produced by plasma-assisted catalytic ionization using a porous nickel plate, where the irradiation current density and energy of positive ions produced by discharge to the porous plate are controlled. The ion energy distributions are analyzed from the properties of current densities of positive and negative ions extracted from the porous surface. Positive ions passing through fine pores of the porous plate and positive and negative ions produced on the porous surface are observed. It is clarified that the produced fluxes of positive and negative ions and the flux balance between them are controlled by the irradiation current density and energy, respectively. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4748273]
引用
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页数:4
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