Process Development of an Electroplated Permalloy Layer on Magnetic Magnesium for Gentelligent™ Products

被引:0
|
作者
Belski, A. [1 ]
Wurz, M. C. [1 ]
Rissing, L. [1 ]
机构
[1] Univ Hannover, Ctr Prod Technol, Inst Micro Prod Technol, D-30823 Garbsen, Germany
来源
关键词
D O I
10.1149/1.3573591
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Magnetic magnesium (Mg) is a new storage medium for gentelligent (TM) products and requires a reflective layer on its surface to enable a readout process. The readout process is executed by a magneto-optical method based on the KERR effect. A small rotation of a reflected light plane becomes visible applying a soft magnetic 5 mu m thick NiFe81/19 layer on top of the magnetic Mg storage medium which mirrors the magnetization states in the storage material. For the electrodeposition of a NiFe81/19 layer on the magnetic Mg surface, the combination of physical vapor deposition (PVD) and electroplating is applied. The thin NiFe81/19 layer deposited by PVD serves as a protection film on the sample surface to avoid etching during electroplating. The electroplating parameters are investigated and optimized to achieve a required concentration of Fe in the deposited layer.
引用
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页码:93 / 104
页数:12
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