Laser-Induced Transient Self-Organization of TiNx Nano-Filament Percolated Networks for High Performance Surface-Mountable Filter Capacitors

被引：7

作者：

Wang, Fangcheng ^{[1
,2
]}

Guo, Zhenbin ^{[3
]}

Wang, Zhiyuan ^{[1
]}

Zhu, Haojie

Zhao, Guangyao ^{[1
]}

Chen, Chaojie ^{[1
]}

Liu, Mingjie ^{[1
]}

Sun, Rong ^{[2
]}

Kang, Feiyu ^{[1
]}

Wong, Ching-Ping ^{[4
]}

Yang, Cheng ^{[1
]}

机构：

[1] Tsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Inst Mat Res, Shenzhen 518055, Peoples R China

[2] Chinese Acad Sci, Shenzhen Inst Adv Elect Mat Shenzhen Fundamental R, Shenzhen Inst Adv Technol, Shenzhen 518055, Peoples R China

[3] Shenzhen Univ, Inst Semicond Mfg Res, Shenzhen 518060, Guangdong, Peoples R China

[4] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA

来源：

ADVANCED MATERIALS | 2023年 / 35卷 / 15期

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

laser-induced transient self-organization; surface-mountable filter capacitors; TiNx nanonetworks; ultrafine nano-filaments; ULTRAFAST ELECTROCHEMICAL CAPACITORS; MICRO-SUPERCAPACITORS; ON-CHIP; SCALABLE FABRICATION; THIN-FILMS; GRAPHENE; DENSITY; ARRAYS;

D O I：

10.1002/adma.202210038

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Filter capacitors (FCs) are substantial for digital circuits and microelectronic devices, and thus more compact FCs are eternally demanded for system miniaturization. Even though microsupercapacitors are broadly regarded as an excellent candidate for future FCs, yet due to the limitation of available electrode materials, the capacitive performance of reported MSCs drops sharply under high-frequency alternating current. Herein, we present a unique laser-induced transient self-organization strategy, which synergizes pulsed laser energy and multi-physical field controlled coalescence processes, leading to the rapid and controllable preparation of titanium nitride ultrafine nano-filaments (diameter approximate to 3-5 nm) networks. Their chaotic fractal nanoporous structure, superior specific surface area, and excellent conductivity render these nanostructures promising candidates for FCs. Surface-mounted filter capacitors based on this electrode material exhibit ultra-long cycle-life (2 000 000 cycles) with record ultrahigh volumetric energy density of 9.17 mWh cm(-3) at 120 Hz in aqueous electrolyte, displaying advantages in function, size, and integrability compared with the state-of-the-art aluminum electrolytic capacitors. The method here provides a versatile toolbox for designing novel nanostructures with intriguing characteristics and insights for developing advanced and miniaturized filter and power devices.

引用

页数：13