[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Thin Film Optic, Shanghai 201800, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[3] Shanghai Univ, Sch Microelect, Shanghai 201800, Peoples R China
[4] Fudan Univ, Adv Coatings Res Ctr Minist Educ China, State Key Lab Mol Engn Polymers, Dept Mat Sci, Shanghai 200433, Peoples R China