E-nose based on a high-integrated and low-power metal oxide gas sensor array

被引:57
|
作者
Li, Zhongzhou [1 ]
Yu, Jun [1 ]
Dong, Diandian [1 ]
Yao, Guanyu [1 ]
Wei, Guangfen [2 ]
He, Aixiang [2 ]
Wu, Hao [1 ]
Zhu, Huichao [1 ]
Huang, Zhengxing [1 ]
Tang, Zhenan [1 ]
机构
[1] Dalian Univ Technol, Fac Elect Informat & Elect Engn, Key lab Liaoning Integrated Circuits & Med Elect S, Dalian 116024, Peoples R China
[2] Shandong Technol & Business Univ, Sch Informat & Elect Engn, Yantai 264005, Peoples R China
基金
中国国家自然科学基金;
关键词
E; -nose; Microhotplate; Electrohydrodynamic printing; Qualitative identification; Quantitative estimation; SENSING PROPERTIES; WAVELET TRANSFORM; IDENTIFICATION; PD; RECOGNITION; SYSTEM; DISCRIMINATION; HOTPLATE; QUALITY; TOLUENE;
D O I
10.1016/j.snb.2023.133289
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
To improve the poor selectivity of a semiconductor gas-sensor system, an array of sensors can be utilized. However, this increases the system's size and power consumption. To overcome these limitations, we propose a high-integrated and highly selective electronic nose (E-nose) comprising two independent gas-sensing elements on a low-power microhotplate (MHP). Pd-SnO2 nanoflowers and Pd-WO3 microparticles were prepared and printed on a bridge-structured MHP 20 mu m apart and over an area of 110 mu m x 45 mu m. This was achieved using electrohydrodynamic inkjet printing aided by in-situ infrared laser curing to form an array of sensors. A power of 17 mW was required to increase the temperature of the MHP to 300 degrees C, which is the optimal operating temperature of the two gas sensors. Thus, a high response and low cross-sensitivity were achieved for hydrogen, ammonia, hydrogen-ammonia, ethanol, acetone, ethanol-acetone, toluene, and formaldehyde. A wavelet transform was used to reduce the noise and dimensionality of the signals from the gas-sensor array. Qualitative identification of the eight gases with an accuracy of 99.86% was achieved using the k-nearest neighbor (kNN) model. A p neighbors back propagation neural network (pN-BPNN) model was established to remove interfering samples to quantitatively estimate the gas concentration. The quantitative identification accuracy of pN-BPNN was higher than that of the standard back propagation neural network (BPNN) model with the average absolute percentage error of hydrogen detection in the range of 15-500 ppm, decreasing from 5.44% to 2.08%.
引用
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页数:14
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