Evolution of point defects in pulsed-laser-melted Ge1-x Sn x probed by positron annihilation lifetime spectroscopy

被引:3
|
作者
Steuer, O. [1 ,6 ]
Liedke, M. O. [2 ]
Butterling, M. [2 ]
Schwarz, D. [3 ]
Schulze, J. [4 ]
Li, Z. [1 ]
Wagner, A. [2 ]
Fischer, I. A. [5 ]
Huebner, R. [1 ]
Zhou, S. [1 ]
Helm, M. [1 ,8 ]
Cuniberti, G. [6 ]
Georgiev, Y. M. [1 ,7 ]
Prucnal, S. [1 ]
机构
[1] Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, Bautzner Landstr 400, D-01328 Dresden, Germany
[2] Helmholtz Zentrum Dresden Rossendorf, Inst Radiat Phys, Bautzner Landstr 400, D-01328 Dresden, Germany
[3] Univ Stuttgart, Inst Semicond Engn, D-70569 Stuttgart, Germany
[4] Fraunhofer Inst Integrated Syst & Device Technol I, D-91058 Erlangen, Germany
[5] Brandenburg Tech Univ Cottbus Senftenberg, Expt Phys & Funct Mat, D-03046 Cottbus Senftenberg, Germany
[6] Tech Univ Dresden, Inst Mat Sci, Budapester Str 27, D-01069 Dresden, Germany
[7] Bulgarian Acad Sci, Inst Elect, 72, Tsarigradsko Chausse Blvd, Sofia 1784, Bulgaria
[8] Tech Univ Dresden, Ctr Adv Elect Dresden, Helmholtzstr 18, D-01062 Dresden, Germany
关键词
GeSn; laser annealing; positron annihilation; PLM; point defects; EPITAXIAL-GROWTH; BEAM; SEMICONDUCTORS; STABILITY; GERMANIUM; RANGE; FILMS; SI;
D O I
10.1088/1361-648X/ad0a10
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Direct-band-gap Germanium-Tin alloys (Ge1-xSnx) with high carrier mobilities are promising materials for nano- and optoelectronics. The concentration of open volume defects in the alloy, such as Sn and Ge vacancies, influences the final device performance. In this article, we present an evaluation of the point defects in molecular-beam-epitaxy grown Ge1-xSnx films treated by post-growth nanosecond-range pulsed laser melting (PLM). Doppler broadening - variable energy positron annihilation spectroscopy and variable energy positron annihilation lifetime spectroscopy are used to investigate the defect nanostructure in the Ge1-xSnx films exposed to increasing laser energy density. The experimental results, supported with ATomic SUPerposition calculations, evidence that after PLM, the average size of the open volume defects increases, which represents a raise in concentration of vacancy agglomerations, but the overall defect density is reduced as a function of the PLM fluence. At the same time, the positron annihilation spectroscopy analysis provides information about dislocations and Ge vacancies decorated by Sn atoms. Moreover, it is shown that the PLM reduces the strain in the layer, while dislocations are responsible for trapping of Sn and formation of small Sn-rich-clusters.
引用
收藏
页数:10
相关论文
共 14 条
  • [1] Evolution of native point defects in ZnO bulk probed by positron annihilation spectroscopy
    彭成晓
    王科范
    张杨
    郭凤丽
    翁惠民
    叶邦角
    Chinese Physics B, 2009, 18 (05) : 2072 - 2077
  • [2] Evolution of native point defects in ZnO bulk probed by positron annihilation spectroscopy
    Peng Cheng-Xiao
    Wang Ke-Fan
    Zhang Yang
    Guo Feng-Li
    Weng Hui-Min
    Ye Bang-Jiao
    CHINESE PHYSICS B, 2009, 18 (05) : 2072 - 2077
  • [3] Confronting Vegard's rule in Ge1-x Sn x epilayers: from fundamentals to the effect of defects
    Magalhaes, S.
    Dias, M.
    Nunes, B.
    Oliveira, F.
    Cerqueira, M. F.
    Alves, E.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2022, 55 (29)
  • [4] Synthesis of Ge1-x Sn x Alloy Thin Films Using Ion Implantation and Pulsed Laser Melting (II-PLM)
    Bhatia, A.
    Oo, W. M. Hlaing
    Siegel, G.
    Stone, P. R.
    Yu, K. M.
    Scarpulla, M. A.
    JOURNAL OF ELECTRONIC MATERIALS, 2012, 41 (05) : 837 - 844
  • [5] Influence of H2 on strain evolution of high-Sn-content Ge1-x Sn x alloys
    Zheng, Jun
    Huang, Wenqi
    Liu, Zhi
    Xue, Chunlai
    Li, Chuanbo
    Zuo, Yuhua
    Cheng, Buwen
    Wang, Qiming
    JOURNAL OF MATERIALS SCIENCE, 2017, 52 (01) : 431 - 436
  • [6] Positron annihilation lifetime Spectroscopy of air-fired Ca(1-x)(La)xTiO3 perovskites
    Hadley, JH
    Hsu, FH
    Vance, ER
    Begg, BD
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2005, 88 (01) : 246 - 248
  • [7] Native vacancy defects in Zn1-x(Mn,Co)xGeAs2 studied with positron annihilation spectroscopy
    Kilanski, L.
    Zubiaga, A.
    Tuomisto, F.
    Dobrowolski, W.
    Domukhovski, V.
    Varnavskiy, S. A.
    Marenkin, S. F.
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (01)
  • [8] Speciation of uranium and doping induced defects in Gd1.98U0.02Zr2O7: Photoluminescence, X-ray photoelectron and positron annihilation lifetime spectroscopy
    Gupta, Santosh K.
    Reghukumar, C.
    Pathak, Nimai
    Sudarshan, K.
    Tyagi, D.
    Mohapatra, M.
    Pujari, P. K.
    Kadam, R. M.
    CHEMICAL PHYSICS LETTERS, 2017, 669 : 245 - 250
  • [9] Positronium formation and inhibition in binary ionic solid solutions of general formula Al(1-x)Cr(x)K(SO4)2•12 H2O:: A positron annihilation lifetime and Doppler broadening spectroscopy study
    Machado, JC
    de Lima, GM
    Oliveira, FC
    Marzano, IM
    CHEMICAL PHYSICS LETTERS, 2006, 418 (1-3) : 292 - 295
  • [10] Microstructural and defects characteristics of xV2O5-(1-x)(0.35MoO3-0.65ZnO) glass nanocomposites utilizing positron annihilation spectroscopy and correlated experimental methods
    Das, Anindya Sundar
    Biswas, Dipankar
    MATERIALS TODAY-PROCEEDINGS, 2022, 59 : 1643 - 1650