共 14 条
Evolution of point defects in pulsed-laser-melted Ge1-x Sn x probed by positron annihilation lifetime spectroscopy
被引:3
|作者:
Steuer, O.
[1
,6
]
Liedke, M. O.
[2
]
Butterling, M.
[2
]
Schwarz, D.
[3
]
Schulze, J.
[4
]
Li, Z.
[1
]
Wagner, A.
[2
]
Fischer, I. A.
[5
]
Huebner, R.
[1
]
Zhou, S.
[1
]
Helm, M.
[1
,8
]
Cuniberti, G.
[6
]
Georgiev, Y. M.
[1
,7
]
Prucnal, S.
[1
]
机构:
[1] Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, Bautzner Landstr 400, D-01328 Dresden, Germany
[2] Helmholtz Zentrum Dresden Rossendorf, Inst Radiat Phys, Bautzner Landstr 400, D-01328 Dresden, Germany
[3] Univ Stuttgart, Inst Semicond Engn, D-70569 Stuttgart, Germany
[4] Fraunhofer Inst Integrated Syst & Device Technol I, D-91058 Erlangen, Germany
[5] Brandenburg Tech Univ Cottbus Senftenberg, Expt Phys & Funct Mat, D-03046 Cottbus Senftenberg, Germany
[6] Tech Univ Dresden, Inst Mat Sci, Budapester Str 27, D-01069 Dresden, Germany
[7] Bulgarian Acad Sci, Inst Elect, 72, Tsarigradsko Chausse Blvd, Sofia 1784, Bulgaria
[8] Tech Univ Dresden, Ctr Adv Elect Dresden, Helmholtzstr 18, D-01062 Dresden, Germany
关键词:
GeSn;
laser annealing;
positron annihilation;
PLM;
point defects;
EPITAXIAL-GROWTH;
BEAM;
SEMICONDUCTORS;
STABILITY;
GERMANIUM;
RANGE;
FILMS;
SI;
D O I:
10.1088/1361-648X/ad0a10
中图分类号:
O469 [凝聚态物理学];
学科分类号:
070205 ;
摘要:
Direct-band-gap Germanium-Tin alloys (Ge1-xSnx) with high carrier mobilities are promising materials for nano- and optoelectronics. The concentration of open volume defects in the alloy, such as Sn and Ge vacancies, influences the final device performance. In this article, we present an evaluation of the point defects in molecular-beam-epitaxy grown Ge1-xSnx films treated by post-growth nanosecond-range pulsed laser melting (PLM). Doppler broadening - variable energy positron annihilation spectroscopy and variable energy positron annihilation lifetime spectroscopy are used to investigate the defect nanostructure in the Ge1-xSnx films exposed to increasing laser energy density. The experimental results, supported with ATomic SUPerposition calculations, evidence that after PLM, the average size of the open volume defects increases, which represents a raise in concentration of vacancy agglomerations, but the overall defect density is reduced as a function of the PLM fluence. At the same time, the positron annihilation spectroscopy analysis provides information about dislocations and Ge vacancies decorated by Sn atoms. Moreover, it is shown that the PLM reduces the strain in the layer, while dislocations are responsible for trapping of Sn and formation of small Sn-rich-clusters.
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页数:10
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