High-Speed Compact Plasmonic-PdSe2 Waveguide-Integrated Photodetector

被引:7
|
作者
Jian, Jialing [1 ,2 ,3 ]
Wu, Jianghong [2 ,3 ]
Zhong, Chuyu [4 ]
Ma, Hui [4 ]
Sun, Boshu [2 ,3 ]
Ye, Yuting [2 ,3 ]
Luo, Ye [2 ,3 ]
Wei, Maoliang [4 ]
Lei, Kunhao [4 ]
Liu, Ruizhe [4 ]
Chen, Zequn [2 ,3 ]
Li, Guangyi [5 ]
Dai, Hao [4 ]
Tang, Renjie [2 ,3 ]
Sun, Chunlei [2 ,3 ]
Li, Junying [4 ]
Li, Wei [5 ]
Li, Ming [5 ]
Lin, Hongtao [4 ]
Li, Lan [2 ,3 ]
机构
[1] Zhejiang Univ, Hangzhou 310027, Peoples R China
[2] Westlake Univ, Sch Engn, Key Lab Micro Nano Fabricat & Characterizat Zheji, Hangzhou 310024, Peoples R China
[3] Westlake Inst Adv Study, Inst Adv Technol, Hangzhou 310024, Peoples R China
[4] Zhejiang Univ, Coll Informat Sci & Elect Engn, Key Lab Micronano Elect & Smart Syst Zhejiang Pro, Hangzhou 310027, Peoples R China
[5] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
关键词
integrated photodetector; plasmonics; slotwaveguide; PdSe2; HIGH-RESPONSIVITY;
D O I
10.1021/acsphotonics.3c00453
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Waveguide-integrated photodetectors are essential components in integrated photonic circuits since they facilitate light conversion into electrical signals. Nonetheless, optical absorption and carrier collection can significantly affect the device performance. As a solution to this issue, plasmonic slot waveguides confine optical energy within a subwavelength scale in a photoconductive detector, enhancing optical absorption and providing extremely short channels to collect carriers. Two-dimensional van der Waals layered palladium selenide (PdSe2) exhibits the merits of a narrow bandgap and high carrier mobility, thus positioning it as a favorable candidate material for photodetectors operating at the telecommunication band. In this study, we propose and experimentally verify a high-speed PdSe2-plasmonic waveguide-integrated photodetector with a dark current of 4.5 mu A and an intrinsic responsivity of 560.1 mA center dot W-1 at 3 V. Additionally, it has an internal quantum efficiency of 32.3%, and the measured 3 dB bandwidth is 17.5 GHz. This integrated photodetector fulfills the requirements of various critical applications in optical communication, microwave photonics, sensing, and imaging.
引用
收藏
页码:3494 / 3501
页数:8
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