共 50 条
- [3] Sensitive capacitive pressure sensors based on graphene membrane arrays Microsystems & Nanoengineering, 6
- [5] Touch mode capacitive pressure sensors for industrial applications MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, : 284 - 289
- [7] Laser speckle grayscale lithography: a new tool for fabricating highly sensitive flexible capacitive pressure sensors LIGHT-ADVANCED MANUFACTURING, 2024, 5 (02):